Steinmeyer Introduces New Precision Vertical Stage

Steinmeyer announced a new vertical positioning stage manufactured by its FMD division. The model HT 03-LM offers a travel of 3 mm with accuracy of 2 microns and repeatability of 20 nanometers, making it suitable for wafer positioning. A compact piezo linear motor is used to drive a 10:1 ratio wedge. Precision crossed roller bearings ensure smoothness of motion and high rigidity. Manufactured from stable aluminum alloy, the HT 03-LM weighs only 3.6 kg, but can handle loads up to 200 Newtons. Maximum speed is 25 mm/sec and position feedback is provided by a precision linear encoder with 0.1 um resolution.