The ACR-32UT precision rotation stage is a low profile rotary table with a high-speed direct-drive rotary servo motor. The 32 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300 mm silicon wafers for semiconductor processing.
ACR-32UT has a very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and can accelerate quickly to 1,500 rpm. This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
These features make the ACR-32UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms, according to the company. IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.