Aerotech has introduced a new X-Y linear motor stage with industry-leading geometric and dynamic performance for applications where straightness and flatness are critical, the company reports. The PlanarDL series includes nine different travel and performance configurations to support such diverse uses as surface profilometry and high-speed scribing of semiconductor and LED wafers.With anti-creep crossed-roller bearings, precision-machined surfaces and linear motors driving through the axes’ center-of-stiffness, the stages deliver straightness to ±0.4 µm and flatness to ±1 µm. Structural elements are optimized for high dynamics and stiffness. The stages achieve 1 m/s velocity and 1.5 g acceleration, enabling high throughput, high-accuracy processing and low total cost of ownership. Aerotech’s proprietary direct-drive technology assures long, maintenance-free working life. High-performance options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.