Intellidrives Introduces Ultra-Thin Direct Drive Rotary Table
January 4, 2018—
The Intellidrives ultra-thin large aperture direct drive rotary table.
The Intellidrives ACR-335UT precision rotation stage is a low profile rotary table with high-speed direct-drive rotary servo motor. The large 335UT mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300 mm silicon wafers for semiconductor processing.
ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm. This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
These features make the ACR-335UTUT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms. IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
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