Steinmeyers New Inspection System Serves Semiconductor Industry
This table features a low profile design with an overall height of only 55 mm and offers a standard travel of 205 mm X 245 mm and repeatability of 1 micron and standard resolution is 20 nm.
Included inside this compact design are the drive mechanisms, encapsulated Steinmeyer precision ball screw and a stepper motor with incremental linear encoder.
Manufactured from high strength anodized aluminum, the table weighs less than 10 kg and offer speeds up to 100mm/s with accelerations of 500 mm/s$B%$(B. The unit is also suitable for a class 10 clean room.
The standard stage includes a stationary terminal and integrated cables for motor, measuring system and vacuum connectors for chucks. Stage drives optional 40 mm to the left or right asymmetric to the optical axis which simplifies the automatic loading and unloading of the wafers. It also offers an apperature of 84mm through the center.
The KDT450-205-SM-L is suitable for applications in the semiconductor industry.